PIEZOELECTRIC-FERROELECTRIC ACTUATOR DEVICE

摘要

An actuator device is disclosed. The actuator device comprises a stack of piezoelectric-ferroelectric active layers separated by surface electrodes. At least a few of the surface electrodes are independently addressable such that at least two active layers are biasable by different voltages. In an embodiment of the invention, at least a few of the voltages induce a nonlinear ferroelectric effect.