发明名称 |
SYSTEM AND METHOD OF MEASURING PROBE FLOAT |
摘要 |
A system and method allow accurate calculation of probe float through optical free-hanging and electrical planarity measurement techniques. In accordance with an exemplary embodiment, probe float may be determined by acquiring a free-hanging planarity measurement, obtaining a first electrical contact planarity measurement, and calculating probe float using results of the acquiring and the obtaining operations.
|
申请公布号 |
US2010321056(A1) |
申请公布日期 |
2010.12.23 |
申请号 |
US20090637858 |
申请日期 |
2009.12.15 |
申请人 |
RUDOLPH TECHNOLOGIES, INC. |
发明人 |
STROM JOHN T.;KRAFT RAYMOND H. |
分类号 |
G01R1/067;G01R1/073;G01R31/28 |
主分类号 |
G01R1/067 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|