发明名称 SYSTEM AND METHOD OF MEASURING PROBE FLOAT
摘要 A system and method allow accurate calculation of probe float through optical free-hanging and electrical planarity measurement techniques. In accordance with an exemplary embodiment, probe float may be determined by acquiring a free-hanging planarity measurement, obtaining a first electrical contact planarity measurement, and calculating probe float using results of the acquiring and the obtaining operations.
申请公布号 US2010321056(A1) 申请公布日期 2010.12.23
申请号 US20090637858 申请日期 2009.12.15
申请人 RUDOLPH TECHNOLOGIES, INC. 发明人 STROM JOHN T.;KRAFT RAYMOND H.
分类号 G01R1/067;G01R1/073;G01R31/28 主分类号 G01R1/067
代理机构 代理人
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