发明名称 |
SHEET USED FOR PROCESSING WAFER |
摘要 |
<p>PURPOSE: The sheet for the wafer fabrication effectively controls the blocking phenomena created in the wafer fabrication which is effectively used as for processing sheet at all kinds of the wafer process fabrications. CONSTITUTION: The blocking layer(12) is formed in the single-side of the material(11). The blocking layer comprises the resin component of the resin component of the thermal curing state or the uncured state. The materials the photo-cured product of the photocurable composition including the high molecular weight polymer and monomer component.</p> |
申请公布号 |
KR20100134530(A) |
申请公布日期 |
2010.12.23 |
申请号 |
KR20100056434 |
申请日期 |
2010.06.15 |
申请人 |
LG CHEM. LTD. |
发明人 |
KIM, SE RA;JOO, HYO SOOK;CHANG, SUK KY;SHIM, JUNG SUP |
分类号 |
H01L21/304 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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