发明名称 |
METHOD FOR FORMING CARBON PATTERN USING ELECTROCHEMICAL REACTION |
摘要 |
<p>PURPOSE: A method for forming carbon pattern using electrochemical reaction is provided to apply the carbon forming method to a large size substrate by implementing reduction of manufacturing cost and uniform patterning. CONSTITUTION: A carbon layer(12) is formed on the top of a substrate(10). The substrate may be made of one of organic, inorganic, or organic/inorganic hybrid material. The carbon layer is the crystalline carbon film having the electric conductance. The electrolyte(15) may be one of the acid solution, the basic solution, or the neutral solution.</p> |
申请公布号 |
KR20100133600(A) |
申请公布日期 |
2010.12.22 |
申请号 |
KR20090052231 |
申请日期 |
2009.06.12 |
申请人 |
IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY) |
发明人 |
SEONG, GI HUN;HAN, KWI NAM |
分类号 |
H01L21/027;H01L21/20 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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