Method of manufacturing batches of temperature or strain sensors without calibration by matching resonators

摘要

The method involves fabricating two series of resonators on substrates, respectively. A series of electrical measurements of the two series of resonators is performed to determine pairs of resonant frequencies and capacitances of each resonator, respectively. A series of matching of the resonators is performed according to an aggregate of two criteria defining that dispersion on difference of resonant frequencies is less than a threshold value and dispersion on difference of static capacitances is less than another threshold value.