SYNCHRONIZED IMAGING BY WAY OF AN OPTICAL METHOD AND ATOMIC FORCE MICROSCOPY

摘要

A method for imaging at least one sample (112) is proposed in which at least one atomic force microscopy method and at least one optical imaging method are used. In the atomic force microscopy method, at least one sample tip (126) is positioned above the sample (112). In at least one calibration step, at least one position of the sample tip (126) is recognized by way of the optical imaging method. In the process, at least one image recording range of the optical imaging method is selected in a predetermined direction to the position of the sample tip (126). In at least one image recording step, a spatially synchronized recording of data is performed by way of the atomic force microscopy method and by way of the optical imaging method.