发明名称 PORTABLE WAFER COUNTER AND METHOD FOR WAFER COUNTING
摘要 PURPOSE: A portable wafer counter and a wafer counting method are provided to remarkably improve the portability of a wafer counter by integrating a support, a camera, an image processor, and a touch screen monitor in one apparatus. CONSTITUTION: A support is combined to one side of a case(1). The support comprises a cover(12) and a rack(14) supporting a wafer. A photographing hole is formed on one side of the case. A photographing unit obtains an image by photographing the plurality of wafers through the photographing hole. An output unit(40) outputs the count information corresponding to the number of the wafer.
申请公布号 KR20100132587(A) 申请公布日期 2010.12.20
申请号 KR20090051255 申请日期 2009.06.10
申请人 MEERE COMPANY INC. 发明人 BAEK, KWANG SOO;KANG, HYUN GU;LEE, BYUNG GUK
分类号 H01L21/67;H01L21/00 主分类号 H01L21/67
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