GRINDING APPARATUS FOR MANUFACTURING OPTICAL DEVICE, METHOD FOR MANUFACTURING OPTICAL DEVICE, AND PRECISE MEASURING APPARATUS FOR MEASURING SHAPE AND SIZE OF MOLD USED TO MANUFACTURE OPTICAL DEVICE OR SHAPE AND SIZE OF OPTICAL DEVICE

摘要

When a large optical device is incorporated into a large telescope or the like, a support state and a load distribution are different from those when an object to be ground is placed on a workpiece supporting fixture of a processing machine, and a surface shape measured in a state of being mounted on the processing machine is different from a surface shape in an incorporated state. Thus, there has been no apparatus for manufacturing an optical device that is deformed by its own weight. The present invention provides a grinding apparatus for manufacturing an optical device that is deformed by its own weight, including a workpiece supporting fixture having a workpiece support surface shaped so as to closely contact a rear surface opposite to a ground surface of an object to be ground that is to be an optical device in a grinding state, wherein a plurality of piezoelectric actuator holes each having an open portion in the workpiece support surface and a central axis oriented vertically are provided at predetermined hole locations of the workpiece supporting fixture, and a piezoelectric actuator and a load cell are incorporated in each of the piezoelectric actuator holes in a liftable manner.