| 发明名称 |
HYBRID METALLIC WIRE AND METHODS OF FABRICATING SAME |
| 摘要 |
A structure and methods of fabricating the structure. The structure comprising: a trench in a dielectric layer; an electrically conductive liner, an electrically conductive core conductor and an electrically conductive fill material filling voids between said liner and said core conductor.
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| 申请公布号 |
US2010314764(A1) |
申请公布日期 |
2010.12.16 |
| 申请号 |
US20090482777 |
申请日期 |
2009.06.11 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
YANG CHIH-CHAO;CHANDA KAUSHIK;EDELSTEIN DANIEL;LI BAOZHEN |
| 分类号 |
H01L23/535;H01L21/768 |
主分类号 |
H01L23/535 |
| 代理机构 |
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代理人 |
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