| 摘要 |
PROBLEM TO BE SOLVED: To provide a hydro-extraction drying system performing effective hydro-extraction work by delaying a decrease in concentration of an alcoholic solvent contained in a main hydro-extraction solution by immersing a cleaned and then roughly hydro-extracted workpiece into the solution. SOLUTION: The hydro-extraction drying system comprises at least: a rough hydro-extraction device 12 storing a rough hydro-extraction solution 17 as a fluorine-based solvent single body, wherein the cleaned workpiece is immersed into the rough hydro-extraction solution 17 and ultrasonic vibration is applied to the workpiece to separate attached moisture and roughly hydro-extract the workpiece; a main hydro-extraction device 22 heating the main hydro-extraction solution 24 consisting of a fluorine-based solvent and the alcoholic solvent to a temperature below the boiling point of the fluorine-based solvent contained therein and storing the heated solution, and finally hydro-extracting the workpiece by immersing the roughly hydro-extracted workpiece again into the main hydro-extraction solution and applying ultrasonic vibration to the workpiece to dissolve residual moisture into the alcoholic solvent for final hydro-extraction; and a vapor drying device 32 for vapor drying the finally hydro-extracted workpiece by disposing it in a vapor layer 35 formed by heating the stored main hydro-extraction solution 33 to the boiling point of the fluorine-based solvent contained therein. COPYRIGHT: (C)2011,JPO&INPIT
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