| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent contact and collision of a slider without using a reflective sensor requiring high accuracy for optical axis adjustment in an XY stage for controlling the position of the slider two-dimensionally moving on a platen. <P>SOLUTION: In the XY stage for controlling the position of the slider two-dimensionally moving on a plane of the platen, an ultrasonic sensor for detecting that another object is present within a predetermined reference distance on the plane is provided on the slider. A control part is provided, which stops movement of the slider equipped with the ultrasonic sensor when the ultrasonic sensor detects that another object is present within the reference distance. <P>COPYRIGHT: (C)2011,JPO&INPIT |
