NOISE ELIMINATOR, NOISE ELIMINATING METHOD, NOISE POSITION DETECTOR, NOISE POSITION DETECTING METHOD, MEASURING SYSTEM, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To eliminate a noise component generated from a noise source in a transmission path of measuring light. SOLUTION: A noise eliminator eliminating the noise component generated from the noise source present in the transmission path of the measuring light from distribution data of the measuring light on a predetermined measuring surface includes a first propagation calculating section for calculating distribution data obtained by calculating the propagation of the distribution data of the measuring light on the measuring surface to a surface corresponding to the noise source, a noise eliminating section for calculating the distribution data having the noise component generated from the noise source eliminated from the distribution data calculated by the first propagation calculating section, and a second propagation calculating section for calculating the distribution data obtained by calculating the propagation of the distribution data calculated by the noise eliminating section to the measuring surface. COPYRIGHT: (C)2011,JPO&INPIT