| 摘要 |
<p>In order to uniformly perform processing, such as film formation, to a subject to be processed, i.e., a large and heavy optical substrate, the large and heavy optical substrate is accurately and reliably attached to a holder. The vacuum processing apparatus which processes, in a vacuum chamber, the subject to be processed has: a susceptor, which has a surface having recesses and protrusions on the reverse side of the surface on which the subject is to be placed and movably holds the subject; a holder which has a surface having recesses and protrusions that mesh with the recesses and protrusions of the susceptor; a drive mechanism which holds the holder such that the holder can move to be in a first state or a second state; and a control means which moves the susceptor in the state where the holder is held in the first state, connects the susceptor and the holder by meshing the susceptor surface having the recesses and protrusions with the holder surface having the recesses and protrusions, then, after processing the subject by moving the holder having the susceptor connected thereto into the second state, moves the susceptor so as to separate the susceptor surface having the recesses and protrusions and the holder surface having the recesses and protrusions from each other by moving the holder again to be in the first state.</p> |
