| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a technique for actualizing a surface observation device that enables even a beginner to easily select suitable evaluation indexes for a variety of patterns to be evaluated without trial and error. <P>SOLUTION: A plurality of evaluation images are input from an image processing section to an evaluation image input section (step 901). The input evaluation images are displayed on a display 115, and a user rearranges the images with a user's evaluation standard while referring to the display, and defines an evaluation standard (step 902). Evaluated values are calculated for the input evaluation images with a plurality of evaluation indexes (step 903). The evaluated values based upon the evaluation indexes are compared with the evaluation standard that the user defines to calculate correlation coefficients (step 904), and an evaluation index having the largest absolute value of the correlation coefficient is automatically selected as the closest evaluation standard for the evaluation standard that the user defines (step 905). The images are rearranged in the order of the correlation coefficients, and listed and displayed on the display in the order of evaluated values (step 906). <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
