| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum container and a processing unit which increases the degree of vacuum in the container in a short time. SOLUTION: The vacuum container 601 includes a space part 512c in which a substrate is surface-treated in a vacuum state. The vacuum container 601 has a double wall structure including an outer wall part 511 surrounding the space part 512c and an inner wall part 512 arranged on the side of the space part 512c of the outer wall part 511. The inner wall part 512 is made of the materials having higher thermal conductivity than the material of the outer wall part 511. The outer wall part 511 is made of the materials having higher rigidity than the materials of the inner wall part 512. A heating part 515 which heats the inner wall part 512 is attached to the inner wall part 512. COPYRIGHT: (C)2011,JPO&INPIT
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