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发明名称
DURCH PLASMAVERSTÄRKTE CHEMISCHE AUFDAMPFUNG ABGELAGERTE POLYMERISCHE REFLEXMILDERNDE BESCHICHTUNGEN
摘要
申请公布号
AT488784(T)
申请公布日期
2010.12.15
申请号
AT20030719720T
申请日期
2003.04.11
申请人
BREWER SCIENCE, INC.
发明人
SABNIS, RAM;SHIH, WU-SHENG
分类号
G03F7/30
主分类号
G03F7/30
代理机构
代理人
主权项
地址
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