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发明名称
GLASARTIGES FLÄCHENSUBSTRAT, SEINE VERWENDUNG UND VERFAHREN ZU SEINER HERSTELLUNG
摘要
申请公布号
AT489725(T)
申请公布日期
2010.12.15
申请号
AT20030775135T
申请日期
2003.08.22
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
QUENZER, HANS-JOACHIM;SCHULZ, ARNE;MERZ, PETER
分类号
B81C99/00;H01L21/20;B81C1/00;C03B19/02;C03B23/02;H01L21/02;H01L23/02
主分类号
B81C99/00
代理机构
代理人
主权项
地址
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