MANUFACTURING METHOD OF CARBON LAYER FORMATION FROM CARBIDE, AND CONTROLL THE CARBON CRYSTALLINITY IN THE CARBON LAYER

摘要

PURPOSE: A method for manufacturing a carbon layer is provided to produce toughness of an amorphous carbon film by generating carbon crystalline like CNT on a carbon film using CDC(carbide derived coating). CONSTITUTION: A method for manufacturing a carbon layer comprises a step for adding a material catalyzed in CNT production during sintering of carbide. The carbide is the ceramic material. A method for forming the carbide comprises a step for increasing toughness of an amorphous carbon film by accelerating the generation of carbon crystalline on the carbide film.