发明名称 Method of manufacturing a semiconductor device
摘要 A semiconductor device (100) comprises a semiconductor substrate, and a multilayer wiring structure arranged on the semiconductor substrate, the multilayer wiring structure including a plurality of first electrically conductive lines (7a-f), an insulating film covering the plurality of first electrically conductive lines, and a second electrically conductive line (13a-f) arranged on the insulating film so as to intersect the plurality of first electrically conductive lines, wherein the insulating film has gaps in at least some of a plurality of regions (CR1-CR12) where the plurality of first electrically conductive lines and the second electrically conductive line intersect each other, and a width of the gap in a direction along the second electrically conductive line is not larger than a width of the first electrically conductive line. The semiconductor device is a photoelectric conversion device.
申请公布号 EP2261968(A2) 申请公布日期 2010.12.15
申请号 EP20100161984 申请日期 2010.05.05
申请人 CANON KABUSHIKI KAISHA 发明人 AOKI, TAKESHI
分类号 H01L21/768;H01L23/522;H01L27/146 主分类号 H01L21/768
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