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发明名称
摘要
申请公布号
JP4599310(B2)
申请公布日期
2010.12.15
申请号
JP20060024884
申请日期
2006.02.01
申请人
发明人
分类号
H01L21/8247;H01L27/115;H01L29/788;H01L29/792
主分类号
H01L21/8247
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