发明名称 APPARATUS FOR DEPOSITING THIN FILM
摘要 PURPOSE: An apparatus for depositing a thin film is provided to reduce maintenance costs by reducing the size of a target which is installed on the top of a chamber. CONSTITUTION: A window is installed on one side of a chamber so that a substrate can be loaded through the window. A chamber has an evaporation space of a cylindrical shape. A substrate transfer part(200) transfers the substrate to a first direction. A target part(300) evaporates a thin film on the moving substrate. A heater(400) heats the substrate in the chamber.
申请公布号 KR20100126917(A) 申请公布日期 2010.12.03
申请号 KR20090045346 申请日期 2009.05.25
申请人 JUSUNG ENGINEERING CO., LTD. 发明人 PARK, SUK JU;SHIM, KYUNG SIK
分类号 H01L21/203 主分类号 H01L21/203
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