发明名称 Superconducting Transition Edge Sensors and Methods for Design and Manufacture Thereof
摘要 Methods for forming sensors using transition edge sensors (TES) and sensors therefrom are described. The method includes forming a plurality of sensor arrays includes at least one TES device. The TES device includes a TES device body, a first superconducting lead contacting a first portion of the TES device body, and a second superconducting lead contacting of a second portion of the TES device body, where the first and second superconducting leads separated on the TES device body by a lead spacing. The lead spacing can be selected to be different for at least two of the plurality of sensor arrays. The method also includes determining a transition temperature for each of the plurality of sensor arrays and generating a signal responsive to detecting a change in the electrical characteristics of one of the plurality of sensor arrays meeting a transition temperature criterion.
申请公布号 US2010304977(A1) 申请公布日期 2010.12.02
申请号 US20100789954 申请日期 2010.05.28
申请人 SADLEIR JOHN E 发明人 SADLEIR JOHN E.
分类号 H01L39/24;G01K7/00;G06F17/50 主分类号 H01L39/24
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