发明名称 |
Piezoelektrische/elektrostriktive Struktur und Herstellungsverfahren dafür |
摘要 |
A piezoelectric/electrostrictive structure includes a plurality of stacked sheet-shaped piezoelectric/electrostrictive bodies and at least one sheet of a thin film. The interfaces between the piezoelectric/electrostrictive bodies are exposed at side faces of the piezoelectric/electrostrictive structure, the side faces have notches, and at least one sheet of a thin film is placed on the notched portions of side faces. A method for manufacturing a piezoelectric/electrostrictive structure comprises stacking a plurality of ceramic green sheets made of a piezoelectric/electrostrictive material and firing the stacked ceramic green sheets to prepare fired piezoelectric/electrostrictive bodies and a step of forming at least one sheet of a thin film on side faces of the fired piezoelectric/electrostrictive bodies by a chemical vapor deposition process, the interfaces between the sheets are exposed at the side faces. |
申请公布号 |
DE602005024210(D1) |
申请公布日期 |
2010.12.02 |
申请号 |
DE20056024210T |
申请日期 |
2005.05.27 |
申请人 |
NGK INSULATORS LTD. |
发明人 |
OHMORI, MAKOTO;KIMURA, KOJI |
分类号 |
H01L41/083;B41J2/045;B41J2/055;B41J2/135;B41J2/14;B41J2/16;H01L41/04;H01L41/08;H01L41/187;H01L41/22;H01L41/23 |
主分类号 |
H01L41/083 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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