| 摘要 |
PROBLEM TO BE SOLVED: To provide a leak inspection method and a leak inspection device that can, when inspecting for leaks using pressure methods, precisely and reliably subtract the temperature-caused portion of change in the pressure of a fluid inside an object being tested. SOLUTION: This leakage inspecting device is provided with: a pump 12 and electromagnetic valve 13 that control the pressure of a fluid in a space 2A; a pressure sensor 14 that measures the pressure of the fluid in the space 2A and outputs pressure data; and a computation unit 15 that makes the determination of whether or not there is a leak. The computation unit 15 determines whether or not there is a leak of fluid from the component 2 on the basis of the results of exponential analysis performed using two types of pressure data. COPYRIGHT: (C)2011,JPO&INPIT
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