| 摘要 |
PROBLEM TO BE SOLVED: To determine easily a timing for stopping processing of a sample that uses a focused ion beam. SOLUTION: In a processing method for processing the sample, first a hole part is made in the sample along a cross section of the sample so that the hole part has a contact with a cross section of the sample which is to be exposed to the surface by processing (S101). Then, the sample is processed from a direction intersected with the cross section to be exposed to the surface by processing, by using the focused ion beam (S102), and it is determined whether the hole part appears on the surface being processed of the sample (S103); and when the hole part appears on the surface being processed, processing is stopped (S104). COPYRIGHT: (C)2011,JPO&INPIT
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