| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating device capable of easily mounting an opened container in which deposition material is filled no matter whether the opening part of the container is upward or downward, and to provide a vapor deposition method using the heating device. SOLUTION: The heating device 10 comprises a conductive linear body having a coil part 11, capable of resistance heating, wherein the coil part 11 is provided with a bottom part 11A having such a diameter that the cylindrical opened container 20 can be mounted on the coil part 11 by causing either of the opening part 21 and a bottom surface part 22 of the cylindrical opened container 20 to bring into contact with the coil part 11 by gravity. COPYRIGHT: (C)2011,JPO&INPIT
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