发明名称 TEST RESULT ANALYSIS METHOD AND TEST RESULT ANALYSIS DEVICE, ABNORMAL EQUIPMENT DETECTION METHOD AND ABNORMAL EQUIPMENT DETECTION DEVICE, PROGRAM FOR CAUSING COMPUTER TO EXECUTE THE TEST RESULT ANALYSIS METHOD AND ABNORMAL EQUIPMENT DETECTION METHOD,
摘要 <p>In a certain process in a manufacturing line, an angle, which indicates the difference between a first board loading direction in which a board tested in the past is loaded onto equipment which executes the process and a second board loading direction in which a board to be analyzed is loaded onto the equipment, is calculated. Second board in-plane property distribution information is rotated so as to eliminate the angle. The rotated second board in-plane property distribution information is checked with first board in-plane property distribution information.</p>
申请公布号 WO2010137463(A1) 申请公布日期 2010.12.02
申请号 WO2010JP58084 申请日期 2010.05.13
申请人 SHARP KABUSHIKI KAISHA;IMAI, KATSUKI 发明人 IMAI, KATSUKI
分类号 H01L21/66;H01L21/02 主分类号 H01L21/66
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