发明名称 |
VALVE DEVICE, AND DEVICE FOR REGULATING TEMPERATURE OF ELECTRONIC PART |
摘要 |
<p>A valve device (40) for regulating the flow rates of a cold refrigerant and a warm refrigerant which are used to regulate the temperature of an electronic part is provided with flow paths (52a-52c) in which the cold refrigerant and the warm refrigerant can flow, and also with a collecting section (65) to which the flow paths (52a-52c) collect. The collecting section (65) has therein a valve shaft (70) in which a first groove (72) is formed. The valve shaft (70) causes the first groove (72) to face at least two of the flow paths (52a-52c) to connect the at least two flow paths (52a-52c) to each other.</p> |
申请公布号 |
WO2010137137(A1) |
申请公布日期 |
2010.12.02 |
申请号 |
WO2009JP59703 |
申请日期 |
2009.05.27 |
申请人 |
ADVANTEST CORPORATION;IDE, TADATERU;YAMASHITA, TSUYOSHI |
发明人 |
IDE, TADATERU;YAMASHITA, TSUYOSHI |
分类号 |
F16K11/085;F16K11/07;H01L21/66;H05K7/20 |
主分类号 |
F16K11/085 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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