发明名称 VALVE DEVICE, AND DEVICE FOR REGULATING TEMPERATURE OF ELECTRONIC PART
摘要 <p>A valve device (40) for regulating the flow rates of a cold refrigerant and a warm refrigerant which are used to regulate the temperature of an electronic part is provided with flow paths (52a-52c) in which the cold refrigerant and the warm refrigerant can flow, and also with a collecting section (65) to which the flow paths (52a-52c) collect.  The collecting section (65) has therein a valve shaft (70) in which a first groove (72) is formed.  The valve shaft (70) causes the first groove (72) to face at least two of the flow paths (52a-52c) to connect the at least two flow paths (52a-52c) to each other.</p>
申请公布号 WO2010137137(A1) 申请公布日期 2010.12.02
申请号 WO2009JP59703 申请日期 2009.05.27
申请人 ADVANTEST CORPORATION;IDE, TADATERU;YAMASHITA, TSUYOSHI 发明人 IDE, TADATERU;YAMASHITA, TSUYOSHI
分类号 F16K11/085;F16K11/07;H01L21/66;H05K7/20 主分类号 F16K11/085
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