发明名称 SEMICONDUCTOR MEMORY DEVICE AND PRODUCTION METHOD THEREFOR
摘要 PURPOSE: A semiconductor memory apparatus and a manufacturing method thereof are provided to implement the SRAM(Static Random Access Memory) cell which reduces the occupying area remarkably by forming a source, a gate, and a drain in vertical direction on the silicon layer. CONSTITUTION: A first well(1a) is formed within the SRAM cell array. A first storage node(Qa) comprises a first N+ bottom diffusion layer(3a), a second N+ bottom diffusion layer(5a), and a third P+ bottom diffusion layer(4a). A second storage node(Qb) comprises a fourth N+ bottom diffusion layer(3b), a fifth N+ bottom diffusion layer(5b), and a sixth P+ bottom diffusion layer(4b).
申请公布号 KR20100126225(A) 申请公布日期 2010.12.01
申请号 KR20100047888 申请日期 2010.05.24
申请人 UNISANTIS ELECTRONICS (JAPAN) LTD. 发明人 MASUOKA FUJIO;ARAI SHINTARO
分类号 H01L27/11;H01L21/8244 主分类号 H01L27/11
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