| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser annealing device capable of preventing annealing from deteriorating in processing quality and decreasing in processing efficiency. <P>SOLUTION: A pulse laser light L emitted by a laser projection device 1 is incident on a patterned mask 2. The patterned mask 2 branches the pulse laser light L made incident on itself into 1st and 2nd pulse laser lights L<SB>1</SB>and L<SB>2</SB>sectioned in shapes and obtained by combining a plurality of quadrangles so that adjacent quadrangles contact each other only at their corners as to positions in the beams. The 1st pulse laser light L<SB>1</SB>is incident on a substrate W through a 1st mask 3 and a 1st convergence optical system 4. The 2nd pulse light L<SB>2</SB>is incident on the substrate W through a plane mirror 6, a 2nd mask 7, and a 2nd convergence optical system 8. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
