| 摘要 |
<p>PURPOSE: A coating composition is provided to be applied by spin-coating(spin-on composition), to be mixed as a solvent composition, and to be useful as a planarization or via-fill composition. CONSTITUTION: A cyanurate compound comprises the substitution of a plurality of cyanurate nitrogen rings by separate carboxy and/or carboxy ester group. The compound is represented by chemical formula I. In chemical formula I, at least two of R^1OOC(CX_2)_n-, R^2- and R^3OOC(CX_2)_m- radicals are different acidor ester group; R^1, R^2, R^3 and each X are independently hydrogen or non-hydrogen substituent; and n and m are the same or different and are a natural number.</p> |
