| 摘要 |
PURPOSE: A gas spraying device is provided to prevent the thermal deformation of a gas spray plate by receiving the thermal deformation through a sidewall comprised of a plurality of pieces. CONSTITUTION: A support plate(30) is combined with a chamber for processing a substrate. A gas inlet is formed on the support plate. A gas spray plate(40) is separated from the support plate. The gas spray plate or support plate is combined with one side of the sidewall unit.
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