METHOD FOR PRODUCING METAL OXIDE LAYERS BY WAY OF ARC EVAPORATION.

摘要

The invention relates to a method for producing oxidic layers by way of PVD (physical vapor deposition), in particular by way of cathodic arc evaporation, wherein a powder metallurgical target is vaporized and the powder metallurgical target is made up of at least two metal or semimetal constituents, wherein the composition of the metal or semimetal constituents or of the target is selected such that during heating in the transition from room temperature to the liquid phase no phase boundary of purely solid phases with respect to the phase diagram of a molten mixture of the at least two metal or semimetal components is crossed.