| 摘要 |
PROBLEM TO BE SOLVED: To provide a method, a device and a program capable of analyzing accurately a layer structure of a laminate by using an X-ray reflectivity method. SOLUTION: This layer structure analysis method of the laminate using the X-ray reflectivity method includes: an irradiation process for irradiating an X-ray from an X-ray source to, for example, a sample which is a multilayer film; a detection process for detecting by a detector, an X-ray reflected by the sample; a measuring process for measuring by a measuring device, an X-ray reflectivity which is a ratio of the detected X-ray to the irradiated X-ray; and an analysis process for analyzing by an analyzer, the X-ray reflectivity measured by adding decrease of an interference component of a reflected X-ray and a transmitted X-ray on a surface or an interface following diffuse scattering wherein an X-ray is scattered in a direction other than a mirror reflection direction resulting from irregularities on the surface or the interface on the surface or the interface of the sample, when the sample has surface roughness or interface roughness. COPYRIGHT: (C)2011,JPO&INPIT
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