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发明名称
Ionenpumpe und Vakuumpumpanlage dafür
摘要
申请公布号
DE69229511(T2)
申请公布日期
2000.02.03
申请号
DE19926029511T
申请日期
1992.02.12
申请人
EBARA CORP., TOKIO/TOKYO
发明人
NAGAI, KAZUTOSHI;SATAKE, TOHRU;HAYASHI, HIDEAKI;YASUI, TAKANARI
分类号
H01J41/14;H01J41/18;(IPC1-7):H01J41/14
主分类号
H01J41/14
代理机构
代理人
主权项
地址
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