| 摘要 |
PROBLEM TO BE SOLVED: To stabilize contact between an inspection object and a contactor, and to inspect properly, while miniaturizing a probe card for inspecting an electrical characteristic of the inspection object. SOLUTION: A fluid chamber 20 for applying a prescribed contact pressure onto a plurality of probes is provided under a circuit board 10 of the probe card, and over a support plate 12. The fluid chamber 20 has a gas enclosed inside, and has flexibility. Wires 30, 31 for connecting electrically the circuit board 10 to the probes during inspection are laminated on the whole outer periphery of the fluid chamber 20. A notched part 32 extending in the lamination direction of the wires 30, 31 and in the radial direction of the fluid chamber 20 in a plan view is formed on the wires 30, 31. Each wire 30, 31 has respectively insulating members 40 having flexibility and conductive members 41 formed on the surface of the insulating members 40. A plurality of conductive members 41 are formed on the surface of each insulating member 40. COPYRIGHT: (C)2011,JPO&INPIT
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