| 发明名称 |
METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE |
| 摘要 |
A method of fluid sealing a workpiece is provided. The method includes placing a workpiece on a ring, engaging at least one engagement feature of the ring with at least one retaining feature defined by the member and flexing the member to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.
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| 申请公布号 |
US2010295225(A1) |
申请公布日期 |
2010.11.25 |
| 申请号 |
US20100786219 |
申请日期 |
2010.05.24 |
| 申请人 |
NEXX SYSTEMS INC. |
发明人 |
KEIGLER ARTHUR;HARRELL JOHN;LIU ZHENQIU;WU QUNWEI |
| 分类号 |
B23Q3/00;B23K15/00;C25D5/18;C25D5/22;C25D7/12;C25D17/00;C25D21/10;C25D21/12;F16J15/06;H01L21/00 |
主分类号 |
B23Q3/00 |
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