| 摘要 |
PROBLEM TO BE SOLVED: To improve throughput of a substrate laminating apparatus. SOLUTION: The substrate laminating apparatus for laminating substrates having elements formed includes three or more processing units for applying treatment on the substrates and a conveyance unit for carrying the substrate to each of the three or more processing units. One of the three or more processing units is a position aligner for aligning the substrates in position with one another for lamination, and the respective three or more processing units are disposed on a circumference around the turning center of the conveyance unit. COPYRIGHT: (C)2011,JPO&INPIT |
