DIAZASILACYCLOPENTENE DERIVATIVE, PROCESS FOR PRODUCING THE SAME AND PROCESS FOR PRODUCING SILICON-CONTAINING FILM

摘要

PROBLEM TO BE SOLVED: To provide a novel silicon compound which has a high vapor pressure and comes to an excellent material in producing a silicon-containing film and a process for producing the same in a good yield by using a danger-free inexpensive raw material. SOLUTION: A diazasilacyclopentene derivative represented by formula (1) is produced by reacting a diimine, in other words, a 1,4-diaza-1,3-butadiene derivative with an alkali metal and a tetraalkyl orthosilicate, and the silicon-containing film is produced by using the same. COPYRIGHT: (C)2011,JPO&INPIT