发明名称 Oxidkomplexlaminat, Verfahren zur Herstellung eines Oxidkomplexlaminats und Vorrichtung
摘要 <p>A complex oxide laminate including: a substrate; a first complex oxide layer represented by a general formula ABO 3 formed above the substrate; and a second complex oxide layer represented by a general formula AB 1-x C x O 3 formed above the first complex oxide layer, an element A including at least Pb, an element B including at least one of Zr, Ti, V, W, and Hf, and an element C including at least one of Nb and Ta.</p>
申请公布号 DE602006017480(D1) 申请公布日期 2010.11.25
申请号 DE20066017480T 申请日期 2006.08.10
申请人 SEIKO EPSON CORP. 发明人 KIJIMA, TAKESHI;OHASHI, KOJI;HAMADA, YASUAKI
分类号 H01L21/316;H01L21/02;H01L21/8246;H01L27/105;H01L27/115;H01L41/09;H01L41/187;H01L41/318;H01L41/39;H03H3/08;H03H9/25 主分类号 H01L21/316
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