| 摘要 |
PROBLEM TO BE SOLVED: To provide a planar motor capable of highly-accurate position detection with little error. SOLUTION: This planar motor for performing position control in the X-axis direction and in the Y-axis direction of a slider arranged on a platen has a constitution wherein a laser light source, a lens and an image sensor are loaded on the slider, and laser light emitted from the laser light source is reflected by the platen, and then received by the image sensor through the lens. COPYRIGHT: (C)2011,JPO&INPIT
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