发明名称 MANUFACTURING APPARATUS AND DEVICE MANUFACTURING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a manufacturing apparatus advantageous to setting about a notice of an event to a host computer. <P>SOLUTION: The manufacturing apparatus operates in communication with a host computer 119. The manufacturing apparatus includes an 1-Chip CPU 106 and a work station 117. The 1-Chip CPU 106 controls operation of the manufacturing apparatus. The work station 117 communicates with the 1-Chip CPU 106. The work station 117 controls a monitor 102 to display an option about an event generated at the manufacturing apparatus. According to an input selecting the option displayed on the monitor 102, the work station 117 performs setting about an notice of the event to the host computer 119. The work station 117 receives information on the event generated at the manufacturing apparatus from the 1-Chip CPU 106. According to the setting, the work station 117 transmits the information on the event generated at the manufacturing apparatus to the host computer 119. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2010267742(A) 申请公布日期 2010.11.25
申请号 JP20090116904 申请日期 2009.05.13
申请人 CANON INC 发明人 IKEDA KENJI
分类号 H01L21/02;G05B19/418 主分类号 H01L21/02
代理机构 代理人
主权项
地址