| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion source capable of being miniaturized with high efficiency of ion-beam generation. SOLUTION: The ion source 2 includes a plasma-generating chamber 22, a hot cathode 10 arranged in the same, a gas supply pipe 28 supplying raw-material gas 8 to an inner conductor 14, and a drawer electrode system 36 equipped with a plasma electrode 38 for drawing out ion beams 50 from plasma 20. The hot cathode 10 includes a hollow outer conductor 12, the hollow inner conductor 14 arranged concentrically inside the same, and a connecting conductor electrically connecting tips of both conductors 12, 14. The raw-material gas 8 is released into the plasma generating chamber 22 from the tip of the inner conductor 14. The plasma electrode 38, also serving as an anode, is arranged at one end of the plasma chamber 22 so as to be opposed to a tip of the hot cathode 10, and that, has an ion-extracting hole in front of the tip of the inner conductor 14 of the hot cathode 10. COPYRIGHT: (C)2011,JPO&INPIT
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