发明名称 |
PROCESS FOR PRODUCING A CONCENTRATED SOLUTION FOR A PHOTORESIST-STRIPPING LIQUID HAVING LOW WATER CONTENT |
摘要 |
There is provided a process for producing a concentrated solution of quaternary ammonium hydroxide which is characterized in that quaternary ammonium hydroxide in a form of water-containing crystals or of an aqueous solution is mixed with a water-soluble organic solvent selected from the group consisting of glycol ether, glycol and triol and the resulting mixed solution is subjected to a thin-film distillation in vacuo so as to evaporate the low boiling material. In accordance with this process, a concentrated solution of quaternary ammonium hydroxide having low water content is able to be easily produced.
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申请公布号 |
US2010298605(A1) |
申请公布日期 |
2010.11.25 |
申请号 |
US20090863841 |
申请日期 |
2009.08.27 |
申请人 |
HIROSE KATSUTOSHI;KOYAMA HIROYA;KAMASAKA KIMIHIRO;SASABE TARO;KAI NAOSHI |
发明人 |
HIROSE KATSUTOSHI;KOYAMA HIROYA;KAMASAKA KIMIHIRO;SASABE TARO;KAI NAOSHI |
分类号 |
C07C209/84;C07C211/63 |
主分类号 |
C07C209/84 |
代理机构 |
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代理人 |
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地址 |
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