METHOD OF PRODUCING PIEZOELECTRIC ELEMENT ARRAY, PIEZOELECTRIC ELEMENT ARRAY, AND ULTRASONIC PROBE

摘要

In a piezoelectric element array (100), filling material (7) existing on a plurality of piezoelectric elements (1a) arranged in a two-dimensional array is pressed to the piezoelectric elements (1a) by a flat member with a soft layer disposed therebetween, and fills the spaces between the piezoelectric elements (1a). Due to this, the filling material between the elements can be uniformly formed so that the performance variation in the elements is minimized, the precision of the element arrangement positions can be increased, and stable electrode connection can be achieved.