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发明名称
Nichtflüchtige Speichervorrichtung mit einer schwebenden Trap-Speicherzelle und Verfahren zur Herstellung derselben
摘要
申请公布号
DE10235986(B4)
申请公布日期
2010.11.25
申请号
DE20021035986
申请日期
2002.08.06
申请人
SAMSUNG ELECTRONICS CO. LTD.
发明人
LEE, CHANG-HYUN;CHOI, JUNG-DAL;SHIN, WANG-CHUL
分类号
H01L27/04;H01L27/115;G11C16/04;H01L21/28;H01L21/822;H01L21/8234;H01L21/8246;H01L21/8247;H01L27/088;H01L27/10;H01L27/105;H01L29/51;H01L29/788;H01L29/792
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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