发明名称 STENCILS WITH REMOVABLE BACKINGS FOR FORMING MICRON-SIZED FEATURES ON SURFACES AND METHODS OF MAKING AND USING THE SAME
摘要 <p>The present invention is directed to methods for patterning substrates using elastomeric stencils having removable backings and methods of preparing the stencils.</p>
申请公布号 EP2252467(A1) 申请公布日期 2010.11.24
申请号 EP20080872057 申请日期 2008.09.25
申请人 NANO TERRA INC.;MERCK PATENT GMBH 发明人 CHAUHAN, KARAN;MCLELLAN, JOSEPH, M.;AGARWAL, SANDIP;MAYERS, BRIAN, T.;CARBECK, JEFFREY;KUGLER, RALF;KURSAWE, MONIKA
分类号 B41M3/00;B41C1/14;H01L21/48;H05K3/12 主分类号 B41M3/00
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