发明名称 Method for manufacturing passive device and semiconductor package using thin metal piece
摘要 A method for manufacturing passive devices and semiconductor packages using a thin metal piece is provided. According to the method, an adhesive layer is formed on a dummy substrate; a thin metal piece is bonded on the adhesive layer; a masking material is attached to the thin metal piece, a dielectric layer is formed; a masking material is attached to form metal pads; a metal pad is formed, and the formed device is attached to a lower substrate using the metal pads; the adhesive layer and the dummy substrate are removed, a masking material is attached on a surface exposed, a region where passive devices are to be formed is patterned, and the thin metal piece is etched at a predetermined depth; and solder bumps for surface mounting are formed.
申请公布号 US7838380(B2) 申请公布日期 2010.11.23
申请号 US20100695449 申请日期 2010.01.28
申请人 WAVENICS INC.;KOREA ADVANCED INST SCI & TECH 发明人 KWON YOUNG-SE;KIM KYOUNG-MIN
分类号 H01L21/20 主分类号 H01L21/20
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