发明名称 DRESSER FOR ABRASIVE CLOTH
摘要 The invention provides a dresser for an abrasive cloth, which has a smaller abrasive grain diameter than the conventional dresser and has an abrasive grain spacing regulated in a predetermined range depending upon the abrasive grain diameter to simultaneously meet a high level of pad grinding power and a pad flatness and, at the same time, is less likely to cause dropout of abrasive grains. The dresser comprises a plurality of abrasive grains fixed as a single layer on a surface of a metallic support material. The dresser is characterized in that the metallic support material on its surface on which the abrasive grains are fixed has a convex shape, the difference in height between the end part and the central port on the surface is not less than 3μm and not more than 40μm, and the center-to-center spacing between at least one set of adjacent grains is d≰L<2d wherein d represents the diameter of the abrasive grains; L represents the center-to-center spacing between adjacent abrasive grains. The diameter (d) of the abrasive grains is preferably 3μm≰d<100μm.
申请公布号 US2010291844(A1) 申请公布日期 2010.11.18
申请号 US20080812643 申请日期 2008.10.28
申请人 NIPPON STEEL MATERIALS CO., LTD. 发明人 SAKAMOTO HIROAKI;KINOSHITA TOSHIYA
分类号 B24B53/00;B24B53/02;B24B53/12;B24D3/00;B24D3/06;B24D7/02;H01L21/304 主分类号 B24B53/00
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