发明名称 |
DRESSER FOR ABRASIVE CLOTH |
摘要 |
The invention provides a dresser for an abrasive cloth, which has a smaller abrasive grain diameter than the conventional dresser and has an abrasive grain spacing regulated in a predetermined range depending upon the abrasive grain diameter to simultaneously meet a high level of pad grinding power and a pad flatness and, at the same time, is less likely to cause dropout of abrasive grains. The dresser comprises a plurality of abrasive grains fixed as a single layer on a surface of a metallic support material. The dresser is characterized in that the metallic support material on its surface on which the abrasive grains are fixed has a convex shape, the difference in height between the end part and the central port on the surface is not less than 3μm and not more than 40μm, and the center-to-center spacing between at least one set of adjacent grains is d≰L<2d wherein d represents the diameter of the abrasive grains; L represents the center-to-center spacing between adjacent abrasive grains. The diameter (d) of the abrasive grains is preferably 3μm≰d<100μm. |
申请公布号 |
US2010291844(A1) |
申请公布日期 |
2010.11.18 |
申请号 |
US20080812643 |
申请日期 |
2008.10.28 |
申请人 |
NIPPON STEEL MATERIALS CO., LTD. |
发明人 |
SAKAMOTO HIROAKI;KINOSHITA TOSHIYA |
分类号 |
B24B53/00;B24B53/02;B24B53/12;B24D3/00;B24D3/06;B24D7/02;H01L21/304 |
主分类号 |
B24B53/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|