发明名称 RADIATION THERMOMETRY AND RADIATION THERMOMETRY SYSTEM
摘要 With proposed radiation thermometry and radiation thermometry system (10), a thin-film (2) is disposed on a substrate to make a thin-film substrate, and measurement is conducted for polarized radiance components emitted from the thin-film (2) in a direction which is within an angle rangeθeic, from a planar normal line of the thin-film (2), where radiance components remain invariable. A temperature of the thin-film (2) is determined on the basis of the measured results of the polarized radiance components. The polarized radiance components are measured using a radiometer (4) by measuring p-wave polarized radiance components which are parallel to an emitting surface including a direction where the polarized radiance components are measured. A pseudo-blackbody (5) is disposed in a mirror symmetrical state to the radiometer (4), and absorbs and negates background radiations to the radiometer (4). Further, temperatures of the pseudo-blackbody (5) are measured, and will be made allowance for calculation of temperatures of the thin-film (2).
申请公布号 US2010292950(A1) 申请公布日期 2010.11.18
申请号 US20080808754 申请日期 2008.12.11
申请人 TOYO UNIVERSITY 发明人 IUCHI TOHRU;HIRAKA KENSUKE
分类号 G06F15/00;G01K1/00 主分类号 G06F15/00
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